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A Comparative Analysis of Middle-of-Line Contact Architectures for Complementary FETs

$1,700.00
A Comparative Analysis of Middle-of-Line Contact Architectures for Complementary FETs

A Comparative Analysis of Middle-of-Line Contact Architectures for Complementary FETs

$1,700.00

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Additional information

Journal

IEEE Access

Authors

SEUNG KYU KIM
JOHYEON KIM
GUNHEE CHOI
KEE-WON KWON
JONGWOOK JEON

Keywords

Complementary FET (CFET), design-technology co-optimization (DTCO), metal source drain, middle-of-line (MOL), middle VIA (MV), wrap around contact (WAC), pathfinding

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